The minimum spot diameter of the reflection fiber probe for measuring the reflectivity of the sample can only reach about 1-2mm. The spot diameter limits the size of the sample and the spectral spatial resolution. To obtain the spectral information of the sample at a smaller scale, the usual practice is to For use with microscope systems. Micro-area reflectance spectroscopy measurement system combines spectral analysis technology with microscopic optical path, which can collect spectral information of samples on the micron scale, and is widely used in the study of spectral properties of materials in physics, chemistry, biology and other industries.

The system adopts the optical fiber confocal illumination method. Compared with the traditional Kohler illumination, the confocal illumination method can obtain a smaller sampling diameter, that is, it has a higher spatial spectral resolution. As shown in the figure, the light source is connected to the microscope system through the optical fiber, and the spot size is compressed to the micron level through the microscope objective lens and concentrated on the sample plane. , the end face of the receiving fiber, the plane of the imaging camera, and the four sides of the sample plane belong to a conjugate relationship, so that high-precision in-situ spectral measurement can be achieved.

In addition, a spectral channel is reserved in the micro-area reflectance conversion module used in the system. This channel can support the addition of transmittance measurement, Raman spectroscopy or fluorescence spectroscopy on the basis of reflectance spectroscopy. , to achieve multi-spectral comprehensive measurement.

◆ Module design: Spectral measurement can be achieved by adding expansion modules to the microscope, and corresponding detection modules can be customized on the basis of the customer’s existing microscope.

◆ Confocal design: The optical path of the light source and the receiving optical path of the spectrometer are coaxial. The unique confocal design makes the measurement “what you see is what you get”, and the stray light of the system can be effectively suppressed.

◆ Wide spectral detecti